SiC Carrier Plate for ICP Etching

1. Application

Silicon carbide ICP trays are specifically designed for use in the LED industry's ICP etching processes.

2. Key Features

Highly resistant to plasma bombardment, ensuring durability and long service life.

Exceptional thermal conductivity, making them ideal for managing high temperatures during operations.

Excellent temperature uniformity ensures consistent performance across the entire surface of the tray.

3. Why Chooose Huigu

Precision Beyond Standards

● Our high-precision machines achieve ceramic tolerances of 5um（0.005mm） and a surface finish up to Ra 0.02.

Special Solutions Tailored to Your Needs

SSIC: Ceramic tubes up to 1500mm, ceramic liner/ring up to φ700*800 mm.

SISIC: Ceramic tubes up to 3300mm, ceramic plates with substantial dimensions.

Quality Excellence - Assured Product Integrity

Service Commitment - On-Time Deliveries Every Time

Small Minimum Order Quantities

● We offer free standard inspection samples

● We at Huigu do small MOQ to 2pcs. It will be no problem for you to call off very small quantities for samples, pilot productions and/or spare parts.